Siemens has acquired Canopus AI, a specialist in computational and AI-driven metrology, to enhance precision and productivity in semiconductor wafer and mask inspection. The acquisition deepens Siemens’ role across the semiconductor manufacturing value chain by extending its digital design-to-manufacturing framework with advanced metrology and inspection technologies.
As semiconductor geometries continue to shrink and fabrication volumes increase, manufacturers face growing challenges in maintaining yield and consistency. High-volume, data-intensive metrology has become essential to ensuring process accuracy at advanced nodes. Canopus AI’s software strengthens Siemens’ existing portfolio by adding intelligent inspection and measurement capabilities that support tighter process control and improved manufacturing outcomes.
Commenting on the transaction, Tony Hemmelgarn, President and CEO of Siemens Digital Industry Software, said the acquisition reflects Siemens’ focus on applying industrial AI to critical manufacturing challenges. He noted that combining Siemens’ Calibre computational lithography and physics-based simulation tools with Canopus AI’s metrology technologies will create a more connected EDA environment, improving wafer pattern accuracy, accelerating yield stabilization, and shortening time to volume for advanced semiconductor nodes.
Founded in 2021 and headquartered in Grenoble, France, Canopus AI develops software that applies artificial intelligence to wafer and mask inspection workflows. Its proprietary “Metrospection” approach integrates metrology and inspection data to meet the extreme precision demands of next-generation semiconductor processes. Joël Alanis, CEO of Canopus AI, said joining Siemens will allow the company to scale its technology globally and support chipmakers and designers as manufacturing complexity continues to rise.
Siemens AG (Berlin and Munich) is a global technology leader focused on industry, infrastructure, mobility, and healthcare. Guided by its purpose “to create technology that transforms the everyday – for everyone,” Siemens combines the real and digital worlds to help customers accelerate their digital and sustainability transformations. Its innovations make factories smarter, cities more livable, and transportation systems cleaner and more efficient.
A pioneer in industrial AI, Siemens applies its deep industry expertise to make artificial intelligence — including generative AI — practical and impactful across diverse sectors. The company also holds a majority stake in Siemens Healthineers, a world-leading medical technology enterprise advancing healthcare innovation globally. In fiscal year 2024, ending September 30, Siemens Group reported revenue of €75.9 billion and net income of €9.0 billion, with approximately 312,000 employees worldwide across continuing operations.
