Swiss vacuum valve specialist VAT Group has signed an agreement to acquire 100% of Japan-based Atonarp, a developer of advanced real-time molecular profiling technologies for semiconductor and industrial manufacturing processes. The all-cash transaction, valued at approximately CHF 110 million, marks a significant step in VAT’s strategy to strengthen its position in next-generation semiconductor manufacturing solutions.
Atonarp is recognized for its miniaturized mass spectrometry-based sensors, which provide real-time process data from inside semiconductor process chambers. The sensors monitor critical parameters such as precursor gases, reaction byproducts, and plasma species, enabling greater visibility into manufacturing processes. The technology is designed to support advanced process control and autonomous, AI-enabled process intelligence for semiconductor production at technology nodes below 2 nanometers.
The acquisition aligns with VAT’s long-term growth strategy announced during its 2025 Capital Markets Day. By integrating Atonarp’s sensing technologies with its established vacuum valve portfolio, VAT aims to broaden its vacuum subsystem capabilities and deliver more comprehensive solutions for semiconductor manufacturers facing increasingly complex production requirements.
Under the terms of the agreement, VAT will acquire all outstanding shares of Atonarp for approximately CHF 110 million in cash. The transaction will be financed through a newly secured bilateral loan agreement of the same value. Completion is expected during the third quarter of 2026, subject to customary closing conditions, including regulatory approvals. Until the transaction is finalized, VAT and Atonarp will continue to operate as separate and independent companies.
Commenting on the acquisition, Urs Gantner, Chief Executive Officer of VAT, said the addition of Atonarp’s technology will enhance the company’s systems-based approach to vacuum subsystems by incorporating advanced sensing capabilities into its portfolio. He noted that the combined technologies are expected to enable faster, more precise and cost-efficient semiconductor manufacturing for technology nodes below 2 nanometers, supporting the growing demand for advanced AI chips.
Martin Komischke, Chairman of the Board of Directors of VAT, said the acquisition positions the company to address emerging challenges in semiconductor manufacturing while helping establish new industry benchmarks through advanced process monitoring and control.
Prakash Murthy, Founder, President and Chief Executive Officer of Atonarp, said VAT’s technology leadership, strong market presence and close customer relationships will accelerate the adoption of Atonarp’s ASTON product family. He added that the combination of real-time sensing and gas control technologies will play an important role in enabling semiconductor manufacturing at sub-2 nanometer process nodes.
VAT Group is a global leader in high-performance vacuum valve technology, providing innovative solutions that are critical to advanced manufacturing processes. Founded in 1965 and headquartered in Switzerland, the company specializes in the design and production of vacuum valves, multi-valve units, edge-welded bellows, and related technologies.
VAT’s products are widely used in the semiconductor, display, solar, scientific research, and industrial manufacturing sectors, where precise vacuum control is essential. With a strong focus on innovation, quality, and reliability, VAT collaborates closely with leading technology companies to support the development of next-generation electronics and advanced manufacturing systems. Through its global manufacturing, engineering, and service network, VAT Group continues to play a vital role in enabling technological progress across a wide range of high-tech industries.
