Rigaku Corporation, a leading provider of X-ray metrology solutions and a subsidiary of Rigaku Holdings Corporation (headquartered in Akishima, Tokyo; CEO: Jun Kawakami), has officially launched the XTRAIA XD-3300, a high-resolution X-ray diffraction system designed specifically for semiconductor mass production. As the demand for generative AI and data center technologies surges, the pace of semiconductor development is accelerating, particularly in areas like 3D scaling.
The need for next-generation memory types—such as high-bandwidth memory (HBM) and 3D DRAM—and smaller logic chips at 2 nm and beyond is growing rapidly. To meet these advancements, semiconductor manufacturers are increasingly turning to superlattices (nanoscale integrated structures) that use Si/SiGe (silicon/silicon-germanium) processes. Precise control over these advanced internal structures is essential for maximizing performance and yield, necessitating measurement systems capable of accurately assessing the composition and thickness of Si/SiGe films.
In response to these challenges, Rigaku has developed the XTRAIA XD-3300, a cutting-edge metrology system that was designed and built entirely in-house. This system is unique in its ability to perform direct, non-destructive diffraction measurements of superlattice structures with exceptional resolution on microscopic pads on wafers.
The performance of the XTRAIA XD-3300 is driven by its innovative X-ray optical system, which combines high-performance mirrors with bent crystals. This advanced design allows measurements to be completed up to 100 times faster than previous models. Tasks that once took several hours can now be completed in just minutes, significantly improving operational efficiency.
Rigaku is forecasting robust growth for its newly launched XTRAIA XD-3300 system, expecting sales to surpass JPY 1 billion (approximately USD 6.9 million) in FY2025. To support this anticipated demand, the company has already expanded its production capabilities, including the construction of a new factory and the installation of 15 production booths. Starting in the fourth quarter of FY2025, Rigaku plans to accelerate deliveries to global semiconductor manufacturers and is targeting total sales of around JPY 10 billion (approximately USD 69 million) by FY2030.
Commenting on the product’s market potential, Kiyoshi Ogata, Senior Executive Vice President and Product Division General Manager, emphasized the strategic significance of the XTRAIA XD-3300. He noted that the system has already been delivered to several advanced semiconductor manufacturers developing next-generation chips using Si/SiGesuperlattice structures. As these technologies move into mass production, Rigaku expects the demand for high-resolution, non-destructive X-ray diffraction measurement tools like the XD-3300 to grow substantially.
The XTRAIA XD-3300 introduces several breakthrough features that set it apart. It enables direct, non-destructive observation of intricate microscopic structures with unmatched resolution, crucial for improving semiconductor yield. The system delivers a 100-fold increase in measurement speed over previous models, thanks to its use of cutting-edge X-ray convergence optics and mirror technologies. Additionally, it incorporates proprietary software that is uniquely capable of analyzing the diffraction patterns of complex superlattice structures, offering critical support for both high-volume manufacturing and advanced R&D.
Rigaku, established in 1951, has long been at the forefront of analytical technologies such as X-ray and thermal analysis. With operations in over 90 countries and a global workforce of 2,000, the company serves as a key partner to industries and research institutions worldwide. Roughly 70% of its sales come from international markets, and Rigaku continues to innovate across sectors including semiconductors, batteries, environmental science, energy, and life sciences—driven by its mission “To Improve Our World by Powering New Perspectives.”
